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fiberoptic vacuum feedthrough

Recent images of the feedthrough from an installation in a Sloan PVD system.  It is used for optical thickness monitoring.


Inside the vacuum chamber with connected optical fiber.


Bottom view from the outside of the chamber. The optical fiber attached to the feedthrough.

Rough sketch how the feedthrough looks like when it is assembled.


Model FOG25


side view of the feedthrough, complete with protective shielding and a short optical fiber as example.


exploded view of the feedthrough. The fiber clamping inside the vaccum is here shown.

Specifications:

all parts, stainless steel
hole diameter 25,4mm
maximum chamber wall thickness 22mm
soft bakeable to 160 deg C.  (depending on fiber and viton rubber)
quick changeable fiber.
He-leak sniffing holes
fiber diameter 0.1-1.0mm
fiber cabel diameter,  maximum 4mm
6mm connector for  protetive tubing inside the vacuumchamber

One single fiber direct into the chamber wich gives very secure optical transmission. Mechanically stable and flexible design. No fiber connectors or ferrules needed. Very easy setup without any special tools. No polishing of fiber surface neccesery.

Other dimensions or special performance avalible on requests.
KF, CF or ISO- flanges avalible.
for pricing and information contact RALON.

Image on the  feedthrough.

Some rough drawings of the feedthrough, zipped format.