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Optical monitor.


Image of  the installation of an optical in situ monitoring device in a PVD system to a customer.
 The instrument is placed on top of the vacuum chamber.

Side view of the optical monitor
top view  

Specifications:
Range 350-1100nm.  Could be extended to 190nm-IR, depending on type of detector and light source.
32 individual  witness positions
bakeable
low background noice.
High long term stability.
Both transmission and reflectance mode of operation.
High sensitivity.