A carrier system wich allowed handling of 20 glass substrates at a time. This system was rotational symmetric to allow spinndrying. This is an efficient method to dry the glass surace without getting  dry stains. Even thow the water are purified  microscopic amount of impurities still could  contaminate the surface if improper drying was used.

With this system any diameter of the glass  could be handed by changing the side walls of the carrier. All stainless stel and PTFE allowed  for agressive chemicals and high temperature drying after spin drying. Still  after a spin drying sequence a monolayer of  water molecules has to be removed in an  clean room oven.


The spin dryer was  constructed to allow  the carrier to rotate without vibrations.  A shower of purified water  is
 sprayed prior the  high speed spinnig.