To
be able to increase the resolution, a simple reduction system was
developed. An offset film from the priting industry is normally limited
in resolution. This system is
based on standard reproduction lenses and reduction of the
image
by x2. This is however not a straight forward task. One problem is
that the standard Rodenstock lens is not optimized for UV light. Also
lots of
concern is put in the focusing isues. I the image is out of focus
the
resolution will be dramaticly decreased. Also it is
important to have as flat field of light as possible. The
great advantage is that it is possible to copy a pattern very
fast and the damage of the photoresist surface is reduced compared to
contact copying.
The reduction system. 1200W Ultra high presure mercury
light source UV filter condensor optics and micrometer
allignment of the reticle is important to get correct focus.
This device was made to be able to auto center the round glass wich
could have different diameters. Also with this configuration the thicknes
s of the glass does not affect the focus.